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Fundamentals of microfabrication / Marc Madou

Main Author: MADOU, MarcPublication: Boca Raton : CRC, 1997Description: 589 p. : il. ; 28 cm.ISBN: 0-8493-9451-1.Subject - Topical Name: Electrónica | Microelectrónica | Laser | Processo de fabricação
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Item type Current location Call number Status Date due Barcode Item holds
Livro Biblioteca do ISEL MAD. 621.38 (Browse shelf) Available 1009943
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